Архив 26-27 января, 2017 Физико-математические науки PLATINUM SILICIDE FILM FORMATION ON SILICON SURFACE
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Владелец Алина Число скачиваний: 380
Djuraev Untir
Tashkent state technical university
(Tashkent, Uzbekistan)
Abstract. Formation treatment silicide platinum on the surface monocrystallic silicon surface. Shown, that silicide form, size and surface concentration dependence from structure and composition stating phases ―platinum- silicon‖ and from sample temperature in diffusion doped time. Supposed silicide film formation on silicon surface as nanotube.
Keywords: silicide, specific resistance, homogeneity, modulation, scanning, photoemf, nanotube.