default PLATINUM SILICIDE FILM FORMATION ON SILICON SURFACE Популярные

Владелец Число скачиваний: 228

Djuraev Untir

Tashkent state technical university

(Tashkent, Uzbekistan)

Abstract. Formation treatment silicide platinum on the surface monocrystallic silicon surface. Shown, that silicide form, size and surface concentration dependence from structure and composition stating phases ―platinum- silicon‖ and from sample temperature in diffusion doped time. Supposed silicide film formation on silicon surface as nanotube.

Keywords: silicide, specific resistance, homogeneity, modulation, scanning, photoemf, nanotube.