Владелец Алина Число скачиваний: 228
Tashkent state technical university
Abstract. Formation treatment silicide platinum on the surface monocrystallic silicon surface. Shown, that silicide form, size and surface concentration dependence from structure and composition stating phases ―platinum- silicon‖ and from sample temperature in diffusion doped time. Supposed silicide film formation on silicon surface as nanotube.
Keywords: silicide, specific resistance, homogeneity, modulation, scanning, photoemf, nanotube.