Владелец Алина Число скачиваний: 241
Isaev Makhmudxodja Sharipovich, Usmonov Muratkasim
Tashkent state technical university
Abstract. Formation treatment silicide cobalt film on the silicon surface. Optical properties were studied with IR-spectrometer in 1-4 wavelength range. Dependence of refraction factor from thick silicide film had studied. Also had measured optical transmission factor for different thickness silicide films.
Keywords: structure, silicide film, IR-spectrometer, refraction factor, optical transmission.