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Научные Конференции - OPTICAL PROPERTIES OF CoSi2/Si STRUCRURE

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Isaev Makhmudxodja Sharipovich, Usmonov Muratkasim

Tashkent state technical university

(Tashkent, Uzbekistan)

Abstract. Formation treatment silicide cobalt film on the silicon surface. Optical properties were studied with IR-spectrometer in 1-4 wavelength range. Dependence of refraction factor from thick silicide film had studied. Also had measured optical transmission factor for different thickness silicide films.

Keywords: structure, silicide film, IR-spectrometer, refraction factor, optical transmission.